Kopanski, J.
and Novotny, D.
(1989),
Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides, Extended Abstracts of the Electrochemical Society, Hollywood, FL, USA
(Accessed April 20, 2024)
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Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides
Published
Author(s)
, Donald B. Novotny
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
October 15-20, 1989
Conference Location
Hollywood, FL, USA
Pub Type
Conferences
Citation
Created December 30, 1989, Updated October 12, 2021