Abstract We examine the seemingly frequency-dependent gate leakage current component of frequency-modulated charge pumping and show it to be a measurement artifact. If untreated, this results in erroneous defect density extractions. We present a constant shape factor methodology to suppress this component such that frequency-modulated charge pumping is well positioned for advanced device defect characterization.
Proceedings Title: IEEE International Integrated Reliability Workshop Final Report
Conference Dates: October 14-18, 2013
Conference Location: South Lake Tahoe, CA
Conference Title: IEEE International Integrated Reliability Workshop
Pub Type: Conferences