An on-chip Electrostatic Discharge (ESD) protection scheme is demonstrated for MicroElectroMechanical Systems (MEMS)-based Embedded Sensor (ES) System-on-a-Chip (SoC). The ESD protection scheme is implemented with ground-referenced multifinger thyristor-type devices optimized for 1) the Input/Output (I/O) protection, 2) the power supply clamp, and 3) the protection at the internal sensors? electrodes during the micromachining process. The ESD protection structure shows a low leakage current in the order of 10-11 Amps at the SoC operating voltage, and high on-state conductance I-V characteristics for bipolar ESD protection.
Citation: Microelectronics Reliability
Pub Type: Journals
Electrostatic Discharge (ESD), Gas Sensor System on-a-Chip (SoC), MicroElectroMechanical Systems (MEMS), Thyristor.