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Characterization and Metrology for ULSI Technology

Published

Author(s)

David G. Seiler, Alain C. Diebold, W M. Bullis, Thomas J. Shaffner, R. C. McDonald, E. J. Walters
Citation
Characterization and Metrology for ULSI Technology,
Volume
449
Publisher Info
American Institute of Physics, Melville, NY

Citation

Seiler, D. , Diebold, A. , Bullis, W. , Shaffner, T. , McDonald, R. and Walters, E. (1998), Characterization and Metrology for ULSI Technology, American Institute of Physics, Melville, NY (Accessed March 29, 2024)
Created November 1, 1998, Updated February 17, 2017