We report a coplanar waveguide notch filter with an integrated air-bridge, designed for operation at sub-millimeter wave frequencies and cryogenic temperatures. The filter is built with a planar slot- ring antenna, which is in turn loaded with a su-perconducting mixer detector. The filter is designed to have a narrow-band response with 40 dB of at-tenuation at the frequency of interest (1.56 THz). The fabrication of the micro-meter scale structure was accomplished by means of UV photo-lithography and electro-plating. The optimized microelectronic fabri-cation process produced high yield and reliability. Preliminary measurements of a sub-millimeter wave receiver based on this design showed satisfactory performance of the filter.
Citation: Microwave and Optical Technology Letters
Pub Type: Journals
air-bridge, band-stop filter, micro-fabrication, sub-millimeter wave systems