Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Accuracy and Resolution of Nanoscale Strain Measurement Techniques

Published

Author(s)

William A. Osborn, Lawrence H. Friedman, Mark D. Vaudin, Stephan J. Stranick, Michael S. Gaither, Justin M. Gorham, Victor H. Vartanian, Robert F. Cook
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD

Keywords

Strain Measurement, Stress Measurement, CRM, EBSD, XRD, SiGe, Reference Material

Citation

Osborn, W. , Friedman, L. , Vaudin, M. , Stranick, S. , Gaither, M. , Gorham, J. , Vartanian, V. and Cook, R. (2013), Accuracy and Resolution of Nanoscale Strain Measurement Techniques, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD (Accessed March 29, 2024)
Created March 26, 2013, Updated February 19, 2017