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Index of Semiconductor Process Gases - Trimethyl Gallium
|
TRIMETHYL |
M.W. [1] 114.827 |
N.B.P [2] 328.95 K |
T.P [2] 257.45 K |
|
Ga(CH3)3 |
Pc [3] 4.04 MPa |
Tc [3] 510 K |
Vc [3] 0.211 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Esti- |
*1%/0.1% |
5% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
#10% |
#10% |
|||
|
Ref- |
||||||||
|
200 |
*10.98 |
0.02 |
-7290.0 |
33.926 |
-155.951 |
1939.733 |
#12.79 |
#14.41 |
|
210 |
*11.15 |
0.07 |
-5839.0 |
25.958 |
-85.687 |
1038.433 |
#13.50 |
#14.99 |
|
220 |
*11.34 |
0.19 |
-4769.1 |
20.307 |
-49.056 |
582.205 |
#14.22 |
#15.56 |
|
230 |
*11.56 |
0.45 |
-3961.7 |
16.197 |
-29.071 |
339.606 |
#15.00 |
#16.12 |
|
240 |
*11.78 |
0.99 |
-3340.1 |
13.141 |
-17.733 |
204.963 |
#15.79 |
#16.68 |
|
250 |
*12.03 |
2.04 |
-2852.7 |
10.823 |
-11.078 |
127.389 |
#16.62 |
#17.24 |
|
260 |
*12.28 |
3.93 |
-2464.6 |
9.034 |
-7.057 |
81.208 |
#17.48 |
#17.79 |
|
270 |
*12.54 |
7.15 |
-2151.0 |
7.632 |
-4.565 |
52.910 |
#18.37 |
#18.34 |
|
280 |
*12.81 |
12.37 |
-1894.3 |
6.516 |
-2.987 |
35.123 |
#19.29 |
#18.88 |
|
290 |
*13.08 |
20.45 |
-1681.9 |
5.618 |
-1.968 |
23.689 |
#20.20 |
#19.42 |
|
300 |
*13.35 |
32.48 |
-1504.2 |
4.886 |
-1.300 |
16.191 |
#21.18 |
#19.96 |
|
310 |
*13.63 |
49.75 |
-1354.1 |
4.283 |
-0.856 |
11.186 |
#22.18 |
#20.49 |
|
320 |
*13.91 |
73.76 |
-1226.3 |
3.782 |
-0.558 |
7.794 |
#23.16 |
#21.02 |
|
330 |
*14.18 |
106.19 |
-1116.5 |
3.362 |
-0.356 |
5.463 |
#24.20 |
#21.56 |
|
340 |
+14.29 |
148.86 |
-1021.5 |
3.006 |
-0.219 |
3.842 |
#25.22 |
#22.09 |
|
350 |
+14.50 |
203.71 |
-938.9 |
2.703 |
-0.125 |
2.703 |
#26.25 |
#22.61 |
|
360 |
+14.77 |
272.72 |
-866.5 |
2.443 |
-0.061 |
1.896 |
#27.34 |
#23.14 |
|
370 |
+15.08 |
357.91 |
-802.7 |
2.219 |
-0.017 |
1.320 |
#28.41 |
#23.67 |
|
380 |
+15.41 |
461.21 |
-746.2 |
2.024 |
0.013 |
0.907 |
#29.48 |
#24.20 |
|
390 |
+15.74 |
584.49 |
-695.8 |
1.853 |
0.032 |
0.610 |
#30.61 |
#24.72 |
|
400 |
+16.04 |
729.47 |
-650.9 |
1.703 |
0.045 |
0.395 |
#31.71 |
#25.25 |
|
410 |
+16.31 |
897.71 |
-610.5 |
1.571 |
0.052 |
0.240 |
#32.82 |
#25.77 |
|
420 |
+16.52 |
1090.56 |
-574.0 |
1.454 |
0.057 |
0.128 |
#33.93 |
#26.30 |
|
430 |
*16.74 |
1309.14 |
-541.1 |
1.350 |
0.059 |
0.048 |
#35.11 |
#26.83 |
|
440 |
*16.97 |
1554.34 |
-511.1 |
1.256 |
0.059 |
-0.008 |
#36.24 |
#27.36 |
|
450 |
*17.20 |
1826.79 |
-483.8 |
1.173 |
0.059 |
-0.048 |
#37.38 |
#27.89 |
|
460 |
*17.42 |
2126.88 |
-458.9 |
1.097 |
0.057 |
-0.075 |
#38.59 |
#28.41 |
|
470 |
*17.64 |
2454.76 |
-436.0 |
1.029 |
0.055 |
-0.092 |
#39.75 |
#28.94 |
|
480 |
*17.86 |
2810.33 |
-415.0 |
0.968 |
0.053 |
-0.103 |
#40.92 |
#29.48 |
|
490 |
*18.07 |
3193.30 |
-395.7 |
0.912 |
0.051 |
-0.109 |
#42.15 |
#30.01 |
|
500 |
*18.28 |
3603.16 |
-377.8 |
0.860 |
0.049 |
-0.111 |
#43.33 |
#30.54 |
|
550 |
*19.27 |
- |
-305.7 |
0.662 |
0.039 |
-0.094 |
#49.55 |
#33.23 |
|
600 |
*20.20 |
- |
-254.2 |
0.528 |
0.032 |
-0.065 |
#56.03 |
#35.95 |
|
650 |
*21.08 |
- |
-215.9 |
0.433 |
0.028 |
-0.039 |
#62.78 |
#38.70 |
|
700 |
*21.90 |
- |
-186.5 |
0.363 |
0.026 |
-0.020 |
#69.73 |
#41.47 |
|
750 |
*22.67 |
- |
-163.3 |
0.311 |
0.025 |
-0.005 |
#76.91 |
#44.27 |
|
800 |
*23.40 |
- |
-144.6 |
0.270 |
0.025 |
0.005 |
#84.31 |
#47.10 |
|
850 |
*24.08 |
- |
-129.3 |
0.237 |
0.025 |
0.012 |
#91.77 |
#49.92 |
|
900 |
*24.72 |
- |
-116.5 |
0.211 |
0.026 |
0.018 |
#99.48 |
#52.76 |
|
950 |
*25.32 |
- |
-105.7 |
0.190 |
0.027 |
0.021 |
#107.21 |
#55.61 |
|
1000 |
*25.87 |
- |
-96.4 |
0.172 |
0.029 |
0.024 |
#115.01 |
#58.46 |
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data 1995, 24, 1561.
- "Trimethylgallium"; Material Safety Data Sheet; Solkatronic Chemicals, Inc., Fairfield, NJ, 1982.
- Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements", Int. J. Thermophys., In Press.
- Shaulov, Y.K.; Mosin, A.M.; Russ. J. Phys. Chem. (50, 319, 1976).
- Sackman, J.F.; Long, L.H.; Trans. Faraday Soc. (54, 1797, 1958).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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