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Index of Semiconductor Process Gases - Nitrogen
|
NITROGEN |
M.W. [1] 28.0135 |
N.B.P [2] 77.344 K |
T.P [2] 63.149 K |
|
N2 |
Pc [2] 3.4 MPa |
Tc [2] 126.2 K |
Vc [3] 0.089413 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1% |
1% |
3% |
- |
5% |
- |
3% |
3% |
|
Reference |
||||||||
|
77 |
3.50 |
97.19 |
-267.6 |
524.2 |
-7811 |
102120 |
7.4 |
5.4 |
|
80 |
3.50 |
136.90 |
-248.3 |
482.6 |
-4451 |
74995 |
7.7 |
5.6 |
|
85 |
3.50 |
228.82 |
-220.9 |
425.0 |
-877 |
45186 |
8.2 |
5.9 |
|
90 |
3.50 |
360.29 |
-197.9 |
378.6 |
1154 |
27157 |
8.7 |
6.3 |
|
95 |
3.50 |
540.22 |
-178.5 |
340.6 |
2299 |
15969 |
9.2 |
6.6 |
|
100 |
3.50 |
777.99 |
-161.9 |
309.0 |
2925 |
8892 |
9.7 |
7.0 |
|
110 |
3.50 |
1467.16 |
-134.9 |
259.7 |
3371 |
1425 |
10.6 |
7.6 |
|
120 |
3.50 |
2515.42 |
-113.9 |
223.2 |
3342 |
-1681 |
11.5 |
8.3 |
|
130 |
3.50 |
- |
-97.2 |
195.2 |
3151 |
-2900 |
12.4 |
8.9 |
|
140 |
3.50 |
- |
-83.6 |
173.0 |
2919 |
-3272 |
13.3 |
9.5 |
|
150 |
3.50 |
- |
-72.3 |
155.2 |
2692 |
-3259 |
14.1 |
10.1 |
|
160 |
3.50 |
- |
-62.7 |
140.5 |
2487 |
-3077 |
14.9 |
10.7 |
|
170 |
3.50 |
- |
-54.6 |
128.2 |
2308 |
-2829 |
15.8 |
11.3 |
|
180 |
3.50 |
- |
-47.6 |
117.8 |
2154 |
-2565 |
16.6 |
11.8 |
|
190 |
3.50 |
- |
-41.4 |
108.8 |
2022 |
-2309 |
17.4 |
12.4 |
|
200 |
3.50 |
- |
-36.1 |
101.1 |
1910 |
-2071 |
18.2 |
12.9 |
|
210 |
3.50 |
- |
-31.3 |
94.3 |
1814 |
-1855 |
19.0 |
13.4 |
|
220 |
3.50 |
- |
-27.0 |
88.3 |
1732 |
-1661 |
19.7 |
14.0 |
|
230 |
3.50 |
- |
-23.2 |
83.0 |
1662 |
-1490 |
20.5 |
14.5 |
|
240 |
3.50 |
- |
-19.8 |
78.2 |
1602 |
-1337 |
21.2 |
15.0 |
|
250 |
3.50 |
- |
-16.7 |
74.0 |
1550 |
-1203 |
22.0 |
15.5 |
|
260 |
3.50 |
- |
-13.9 |
70.1 |
1505 |
-1084 |
22.7 |
15.9 |
|
270 |
3.50 |
- |
-11.3 |
66.6 |
1466 |
-979 |
23.5 |
16.4 |
|
280 |
3.50 |
- |
-8.9 |
63.4 |
1433 |
-886 |
24.2 |
16.9 |
|
290 |
3.50 |
- |
-6.8 |
60.4 |
1403 |
-804 |
24.9 |
17.3 |
|
300 |
3.50 |
- |
-4.8 |
57.7 |
1377 |
-731 |
25.6 |
17.8 |
|
310 |
3.50 |
- |
-2.9 |
55.2 |
1354 |
-666 |
26.3 |
18.2 |
|
320 |
3.50 |
- |
-1.2 |
52.9 |
1334 |
-609 |
27.0 |
18.7 |
|
330 |
3.51 |
- |
0.4 |
50.8 |
1316 |
-557 |
27.7 |
19.1 |
|
340 |
3.51 |
- |
1.9 |
48.8 |
1300 |
-512 |
28.4 |
19.6 |
|
350 |
3.51 |
- |
3.3 |
46.9 |
1286 |
-471 |
29.1 |
20.0 |
|
360 |
3.51 |
- |
4.6 |
45.2 |
1273 |
-435 |
29.8 |
20.4 |
|
370 |
3.51 |
- |
5.8 |
43.6 |
1262 |
-402 |
30.5 |
20.8 |
|
380 |
3.51 |
- |
6.9 |
42.1 |
1251 |
-373 |
31.1 |
21.2 |
|
390 |
3.52 |
- |
8.0 |
40.6 |
1242 |
-347 |
31.8 |
21.7 |
|
400 |
3.52 |
- |
9.0 |
39.3 |
1233 |
-324 |
32.5 |
22.1 |
|
410 |
3.52 |
- |
10.0 |
38.0 |
1226 |
-303 |
33.1 |
22.5 |
|
420 |
3.52 |
- |
10.9 |
36.8 |
1219 |
-284 |
33.8 |
22.8 |
|
430 |
3.53 |
- |
11.7 |
35.6 |
1212 |
-267 |
34.4 |
23.2 |
|
440 |
3.53 |
- |
12.5 |
34.5 |
1206 |
-252 |
35.1 |
23.6 |
|
450 |
3.53 |
- |
13.3 |
33.5 |
1201 |
-238 |
35.7 |
24.0 |
|
460 |
3.54 |
- |
14.0 |
32.5 |
1195 |
-226 |
36.4 |
24.4 |
|
470 |
3.54 |
- |
14.7 |
31.6 |
1191 |
-215 |
37.0 |
24.8 |
|
480 |
3.55 |
- |
15.4 |
30.7 |
1186 |
-205 |
37.6 |
25.1 |
|
490 |
3.55 |
- |
16.0 |
29.8 |
1182 |
-196 |
38.3 |
25.5 |
|
500 |
3.56 |
- |
16.6 |
29.0 |
1178 |
-188 |
38.9 |
25.9 |
|
550 |
3.59 |
- |
19.2 |
25.5 |
1162 |
-159 |
42.0 |
27.7 |
|
600 |
3.62 |
- |
21.3 |
22.5 |
1149 |
-144 |
45.0 |
29.4 |
|
650 |
3.66 |
- |
23.0 |
20.1 |
1138 |
-136 |
48.0 |
31.1 |
|
700 |
3.70 |
- |
24.4 |
18.0 |
1128 |
-133 |
50.9 |
32.7 |
|
750 |
3.74 |
- |
25.6 |
16.2 |
1118 |
-134 |
53.8 |
34.2 |
|
800 |
3.78 |
- |
26.6 |
14.7 |
1110 |
-137 |
56.6 |
35.8 |
|
850 |
3.82 |
- |
27.4 |
13.4 |
1101 |
-141 |
59.4 |
37.3 |
|
900 |
3.86 |
- |
28.1 |
12.2 |
1093 |
-146 |
62.2 |
38.7 |
|
950 |
3.90 |
- |
28.8 |
11.1 |
1085 |
-151 |
64.9 |
40.1 |
|
1000 |
3.93 |
- |
29.3 |
10.2 |
1077 |
-156 |
67.6 |
41.5 |
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
- "Standard Tables of Physical Constants of Paraffin Hydrocarbons and Other Components of Natural Gas", Publication No. 2145-84; Gas Processors Association, Tulsa, Oklahoma (1984).
- "IUPAC; International Thermodynamic Tables of the Fluid State-Nitrogen", Pergammon Press, Oxford (1979).
- "TRC Thermodynamic Tables-Hydrocarbons", Thermodynamics Research Center, The Texas A&M University System, College Station, TX (1985).
- Estela-Uribe, J.F. and Trusler, J.P.M., "Acoustic and Volumetric Virial Coefficients of Nitrogen", Inter. J. Thermophys., In Press.
- Hanley, H.J.M. and Ely, J.F., "The Viscosity and Thermal Conductivity Coefficients of Dilute Nitrogen and Oxygen", J. Phys. Chem. Ref. Data (2, 735, 1973).
- McCarty, R.D., Haynes, W.M., and Hanley, H.J.M., "The Viscosity and Thermal Conductivity Coefficients for Dense Gaseous and Liquid Argon, Krypton, Xenon, Nitrogen, and Oxygen", J. Phys. Chem. Ref. Data (3, 979, 1974).
- Wakeham, W. A., Cole, W.A., "The Viscosity of Nitrogen, Oxygen and their Binary Mixtures in the Limit of Zero Density", J. Phys. Chem. Ref. Data (14, 209, 1985).
- Younglove, B.A., "Thermophysical Properties of Fluids.1. Argon, Ethylene, Parahydrogen, Nitrogen, Nitrogen trifluoride, and Oxygen", J. Phys. Chem. Ref. Data (11. Suppl. No. 1., 1982).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
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