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Index of Semiconductor Process Gases - Ethylene Oxide

ETHYLENE OXIDE

M.W. [1]

44.0532

N.B.P [2]

283.6 K

T.P [2]

160.65 K

C2H4O

Pc [3]

7.19 MPa

Tc [3]

469.15 K

Vc [3]

0.14030 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

*1%/+0.1%

5%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

5%

#10%

Reference

*4/+5

6

5

5

5

5

7

5

200.00

*4.36

0.71

-2534.77

10.118

-23168070

312.381

-

#9.99

210.00

*4.46

1.64

-2094.54

8.022

-12053688

160.531

-

#10.35

220.00

*4.57

3.47

-1758.66

6.482

-6497856

86.202

-

#10.71

230.00

*4.69

6.83

-1497.23

5.325

-3598875

48.013

-

#11.06

240.00

*4.83

12.58

-1290.13

4.439

-2031201

27.561

-

#11.41

250.00

*4.97

21.90

-1123.50

3.748

-1158171

16.211

-

#11.75

260.00

*5.12

36.29

-987.56

3.201

-660372

9.717

-

#12.09

270.00

*5.28

57.62

-875.27

2.762

-371344

5.905

-

#12.43

280.00

*5.45

88.08

-781.47

2.406

-201416

3.617

10.59

#12.76

290.00

+5.60

130.21

-702.33

2.113

-100860

2.219

11.43

#13.09

300.00

+5.76

186.90

-634.93

1.869

-41395

1.352

12.30

#13.41

310.00

+5.93

261.32

-577.06

1.665

-6582

0.810

13.21

#13.74

320.00

+6.10

356.91

-526.99

1.493

13314

0.468

14.15

#14.06

330.00

+6.27

477.37

-483.36

1.346

24148

0.252

15.13

#14.38

340.00

+6.45

626.63

-445.11

1.219

29489

0.116

16.15

#14.69

350.00

+6.62

808.81

-411.37

1.110

31533

0.032

17.20

#15.00

360.00

+6.80

1028.24

-381.45

1.016

31640

-0.020

18.29

#15.32

370.00

+6.97

1289.43

-354.78

0.933

30654

-0.050

19.42

#15.62

380.00

+7.15

1597.07

-330.90

0.860

29099

-0.065

20.59

#15.93

390.00

+7.32

1956.04

-309.42

0.795

27296

-0.072

21.79

#16.24

400.00

+7.49

2371.45

-290.02

0.738

25442

-0.073

23.03

#16.54

410.00

+7.66

2848.61

-272.44

0.687

23650

-0.071

24.31

#16.84

420.00

+7.83

3393.09

-256.44

0.641

21985

-0.067

25.63

#17.15

430.00

+7.99

4010.75

-241.84

0.600

20478

-0.061

26.99

#17.45

440.00

+8.14

4707.76

-228.47

0.563

19142

-0.055

28.39

#17.75

450.00

*8.34

5490.66

-216.19

0.530

17977

-0.049

29.83

#18.04

460.00

*8.49

6366.38

-204.89

0.499

16975

-0.042

31.31

#18.34

470.00

*8.64

7342.31

-194.46

0.472

16127

-0.036

32.83

#18.64

480.00

*8.79

-

-184.80

0.446

15419

-0.031

34.40

#18.93

490.00

*8.93

-

-175.84

0.423

14838

-0.026

36.00

#19.23

500.00

*9.07

-

-167.51

0.402

14371

-0.021

37.64

#19.52

550.00

*9.74

-

-133.43

0.318

13340

-0.002

46.50

#20.98

600.00

*10.36

-

-108.45

0.259

13677

0.009

56.45

#22.42

650.00

*10.93

-

-89.48

0.217

14678

0.015

67.54

#23.86

700.00

*11.45

-

-74.65

0.185

15967

0.019

79.80

#25.28

750.00

*11.93

-

-62.77

0.160

17347

0.021

93.28

#26.71

800.00

*12.38

-

-53.06

0.141

18719

0.022

108.02

#28.11

850.00

*12.79

-

-45.00

0.125

20034

0.022

124.08

#29.51

900.00

*13.17

-

-38.21

0.113

21270

0.021

141.50

#30.90

950.00

*13.53

-

-32.42

0.102

22420

0.021

160.34

#32.27

1000.00

*13.85

-

-27.42

0.093

23485

0.020

180.63

#33.63

 

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. Stull, D.P., Shrader, S.Hl, and McDonald, R.A., J. Chem. Eng. Data (1959, 4, 311).
  3. Zwolinski, B.J. and Kudchadker, A.P., Chem. Rev. (1968, 68, 659).
  4. "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1984).
  5. Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements," Int. J. Thermophys. (in press.)
  6. Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
  7. Senftleben, H., Z. Angew. Phys. (1964, 17, 86).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 29, 2009, Updated March 1, 2023