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Index of Semiconductor Process Gases - Carbon Monoxide

CARBON
MONOXIDE

M.W. [1]

28.0104

N.B.P [2]

81.7 K

T.P [2]

68.15 K

CO

Pc [3]

3.499 MPa

Tc [3]

132.92 K

Vc [4]

0.092166 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%

1%

5%

-

10%

-

5%

5%

Reference

5

6

2,7

2,7

8

8

9-11

9,11

75

3.50

44.07

-345.5

579.4

25834

-30427

6.3

4.9

80

3.50

83.65

-300.8

501.8

23762

-33180

6.8

5.3

85

3.50

146.17

-264.7

439.6

21740

-33208

7.3

5.6

90

3.50

238.79

-235.0

389.3

19874

-31936

7.7

6.0

95

3.50

369.17

-210.3

348.2

18195

-30089

8.2

6.3

100

3.50

545.28

-189.4

314.2

16703

-28043

8.7

6.7

110

3.50

1068.16

-156.2

261.8

14222

-24023

9.7

7.4

120

3.50

1879.21

-131.1

223.6

12287

-20501

10.6

8.0

130

3.50

3063.14

-111.5

194.8

10766

-17564

11.5

8.7

140

3.50

-

-95.8

172.5

9555

-15149

12.4

9.3

150

3.50

-

-82.9

154.6

8580

-13167

13.3

9.9

160

3.50

-

-72.2

140.1

7784

-11534

14.2

10.5

170

3.50

-

-63.1

128.2

7127

-10180

15.0

11.1

180

3.50

-

-55.3

118.1

6578

-9049

15.9

11.7

190

3.50

-

-48.6

109.5

6115

-8097

16.7

12.2

200

3.50

-

-42.7

102.1

5721

-7291

17.5

12.8

210

3.50

-

-37.4

95.7

5382

-6602

18.3

13.3

220

3.50

-

-32.8

90.0

5089

-6010

19.1

13.8

230

3.50

-

-28.6

85.0

4833

-5499

19.9

14.4

240

3.50

-

-24.9

80.6

4609

-5054

20.7

14.9

250

3.50

-

-21.5

76.6

4411

-4665

21.4

15.4

260

3.50

-

-18.4

73.0

4234

-4323

22.2

15.9

270

3.50

-

-15.5

69.7

4077

-4021

22.9

16.4

280

3.50

-

-12.9

66.7

3936

-3753

23.7

16.8

290

3.50

-

-10.5

64.0

3808

-3514

24.4

17.3

300

3.50

-

-8.3

61.5

3693

-3301

25.1

17.8

310

3.51

-

-6.3

59.2

3588

-3109

25.8

18.2

320

3.51

-

-4.3

57.1

3492

-2936

26.5

18.7

330

3.51

-

-2.5

55.1

3404

-2781

27.2

19.1

340

3.51

-

-0.9

53.3

3323

-2639

27.9

19.5

350

3.51

-

0.7

51.5

3249

-2511

28.6

20.0

360

3.52

-

2.2

49.9

3179

-2394

29.3

20.4

370

3.52

-

3.6

48.4

3115

-2287

29.9

20.8

380

3.52

-

4.9

47.0

3056

-2189

30.6

21.2

390

3.52

-

6.1

45.7

3000

-2099

31.3

21.6

400

3.53

-

7.3

44.4

2948

-2016

31.9

22.0

410

3.53

-

8.4

43.2

2899

-1939

32.6

22.4

420

3.54

-

9.4

42.1

2853

-1869

33.2

22.8

430

3.54

-

10.4

41.1

2810

-1803

33.8

23.2

440

3.55

-

11.4

40.0

2769

-1743

34.5

23.6

450

3.55

-

12.3

39.1

2731

-1686

35.1

24.0

460

3.56

-

13.2

38.2

2694

-1634

35.7

24.3

470

3.56

-

14.0

37.3

2660

-1585

36.3

24.7

480

3.57

-

14.8

36.5

2627

-1539

37.0

25.1

490

3.58

-

15.5

35.7

2596

-1497

37.6

25.4

500

3.58

-

16.3

34.9

2566

-1457

38.2

25.8

550

3.62

-

19.5

31.6

2435

-1290

41.2

27.6

600

3.66

-

22.1

28.8

2328

-1165

44.0

29.2

650

3.70

-

24.4

26.5

2239

-1069

46.9

30.8

700

3.74

-

25.2

20.8

2163

-994

49.6

32.4

750

3.78

-

26.6

18.8

2096

-934

52.3

33.8

800

3.81

-

27.8

17.0

2038

-885

54.9

35.3

850

3.84

-

28.7

15.5

1985

-844

57.4

36.7

900

3.87

-

29.6

14.1

1938

-809

60.0

38.0

950

3.90

-

30.3

12.9

1895

-780

62.4

39.3

1000

3.91

-

31.0

11.9

1856

-755

64.8

40.6

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. "Selected Values of Properties of Chemical Compounds", Data Project; Thermodynamics Research Center, Texas A&M University, College Station, Texas (1980-extant. loose-leaf data sheets).
  3. Zwolinski, B.J., Kudchadker, A.P., and Alani, G.H., "The Critical Constants of Organic Substances", Chem. Rev. (1968, 68, 659).
  4. "TRC Thermodynamic Tables-Hydrocarbons", Thermodynamics Research Center, The Texas A&M University System, College Station, TX (1985).
  5. Goodwin, R.D., "Carbon Monoxide Thermophysical Properties from 68 to 1000K at Pressures to 100 MPa", J. Phys. Chem. Ref. Data (1985, 14, 849).
  6. Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
  7. Saville, G., DaPointe, M.N., Calado, J.C.G., Barreiros, S.F., "Second Virial Coefficients of Carbon Monoxide", J. Chem. Thermo. (1987, 19, 947).
  8. Calculated from a Lennard-Jones model fit to Ref [2,7] second virial coefficients.
  9. Stephan, K., Lucas, K., "Viscosity of Dense Fluids", New York: Plenum Press (1979).
  10. "Thermal Conductivity 17", Thermophysical Properties Division, Nat. Bur. Stand., Boulder, CO (1983, 294).
  11. "Thermophysical Properties of Matter", IFI/Plenum, New York, (1970).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 18, 2009, Updated February 17, 2022