Thomas Michels is a CNST/TUI Graduate Student Researcher in the Nanofabrication Research Group. He received a B.S. in Microtechnology from University of Gelsenkirchen, Germany and an M.Sc. in Nano- and Microtechnology from the Ilmenau University of Technology. His doctoral research, in collaboration with the CNST, focuses on fabricating self-actuated cantilevers for atomic force microscopy with microcavity optical readout. Thomas is working with Vladimir Aksyuk designing, building, and testing cantilevers that integrate optical detection with electrostatic and thermal actuation.
- High speed quasi-monolithic silicon/piezostack SPM scanning sta, E. Guliyev, T. Michels, B. E. Volland, T. Ivanov, M. Hofer, and I. W. Rangelow, Microelectronic Engineering 98, 520–523 (2012).
- Micromachined self-actuated piezoresistive cantilever for high speed SPM, T. Michels, E. Guliyev, M. Klukowski, and I. W. Rangelow, Microelectronic Engineering 97, 265–268 (2012).