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Madhulika Korde

Publications

X-Ray Metrology of Nanowire/ Nanosheet FETs for Advanced Technology Nodes

Author(s)
Madhulika S. Korde, Regis J. Kline, Daniel F. Sunday, Nick Keller, Subhadeep Kal, Cheryl Alix, Aelen Mosden, Alain C. Diebold
The three-dimensional architectures for field effect transistors (FETs) with vertical stacking of Gate-all-Around Nanowires provide a pathway to increased
Created May 1, 2019