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Charles S Tarrio

Charlie Tarrio received a BS from Bates College in Lewiston, ME, with high honors in physics. He received his PhD in physics from the University of Virginia in Charlottesville under the guidance of Steve Schnatterly. He used electron energy-loss spectroscopy to study electronic and optical properties of a diverse set of materials including superconductors and rare-gas solids. He has been at NIST since 1991. His primary interest is in properties of materials under illumination by vacuum ultraviolet radiation. These include optical constants, mirror reflectivities, susceptibility to environmental contamination, and radiation damage. He's developed several new tools and techniques on the Synchrotron Ultraviolet Radiation Facility. Current tools are described in the links below.

Research Interests


  • DOC Silver Medal, 2012
  • William P. Slichter Award, 2007
  • DOC Silver Medal, 2004
  • Arthur S. Flemming Award in Applied Science, 2003
  • DOC Bronze Medal, 1994


Optics Contamination

Charles S. Tarrio, Shannon B. Hill, Robert F. Berg, Sasa Bajt

Development of an EUVL collector with infrared radiation suppression

Steven E. Grantham, Mike Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Mueller Ulrich, Shayna khatri, Adam Magruder, Charles S. Tarrio
Laser-produced plasma (LPP) sources for extreme ultraviolet lithography (EUVL) systems utilize CO2 lasers operating with wavelength 10.6μm. Since multilayer
Created October 9, 2019, Updated July 24, 2020