This volume deals with the basic knowledge and undestanding of fundamtal interactions of low energy electrons with molecules. It provides an up-to-date and comprehensive account of the fundamental interactions of low energy energy electrons with molecules of current interest in modern technology, especially the semiconductor industry.
Citation: Fundamental Electron Interactions with Plasma Processing Gases
Pub Type: Others
BCl3, c-C4F8, C2F6, C3F8, CF4, CHF3, Cl2, electron impact, electron interactions, electron scattering