Kopanski, J.
, Marchiando, J.
and Lowney, J.
(1996),
Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA
(Accessed April 24, 2024)
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Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon
Published
Author(s)
, ,
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Created December 30, 1996, Updated October 12, 2021