The National Institute of Standards and Technology NIST is a United States Government Agency that develops metrology for the use and advancement of industry. The Office of Microelectronics Industry OMP is supporting the semiconductor industry. We discuss some of the research projects at NIST in support of this industry as an example of how NIST fulfills its mission in support of industry.
Conference Dates: October 25-27, 2006
Conference Location: Queretaro, MX
Conference Title: Symposium of Metrology 2006, Reliable Measurements for the Development of Mexico
Pub Type: Conferences
industry, lithography, metrology, microcalorimeter, microelectronics, research, semiconductor