Diebold, A.
, Kump, M.
, Kopanski, J.
and Seiler, D.
(1995),
Characterization of Two-Dimensional Dopant Profiles: Status and Review, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
(Accessed April 18, 2024)
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Characterization of Two-Dimensional Dopant Profiles: Status and Review
Published
Author(s)
Alain C. Diebold, M. Kump, ,
Proceedings Title
Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Conference Dates
March 20-22, 1995
Conference Location
Research Triangle Park, NC, USA
Pub Type
Conferences
Citation
Created December 30, 1995, Updated October 12, 2021