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PUBLICATIONS

Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, David W. Berning
Proceedings Title
Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Conference Dates
April 6-9, 1997
Conference Location
Research Triangle Park, NC, USA
Pub Type
Conferences

Citation

Kopanski, J. , Marchiando, J. and Berning, D. (1997), Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA (Accessed April 18, 2024)

Created December 30, 1997, Updated October 12, 2021