Dagata, J.
, Perez-murano, F.
, Martin, C.
, Kuramochi, H.
and Yokoyama, H.
(2004),
Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending, Journal of Applied Physics
(Accessed April 16, 2024)
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Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending
Published
Author(s)
, F Perez-murano, , H Kuramochi, H Yokoyama
Citation
Journal of Applied Physics
Volume
96
Issue
No. 4
Pub Type
Journals
Keywords
nanolithography, scanning probe oxidation, silicon, space charge
Citation
Created August 1, 2004, Updated February 19, 2017