Postek, M.
and Larrabee, R.
(2001),
Submicrometer Linewidth Metrology, Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed April 19, 2024)
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Submicrometer Linewidth Metrology
Published
Author(s)
,
Citation
Technical Note (NIST TN) - 958
Report Number
958
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created December 31, 2000, Updated October 12, 2021