Small, J.
(2002),
The Analysis of Particles at Low Accelerating Voltages (<= 10 kV) With Energy Dispersive X-Ray Spectroscopy (EDS), Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed April 19, 2024)
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The Analysis of Particles at Low Accelerating Voltages (
Published
Author(s)
Abstract
In recent years, there have been a series of advancements in electron beam instruments and x-ray detectors which may make it possible to improve significantly the quality of results from the quantitative electron-probe analysis of individual particles. These advances include: (1) field-emission gun electron beam instruments such as scanning electron microscopes, FEG-SEMs, that have high brightness electron guns with excellent performance at low beam energies, EO less than or equal to 10 keV. (2) High-resolution energy-dispersive x-ray spectrometers, like the microcalorimeter detector, that provide high-resolution, less than 10eV, parallel x-ray collection. These devices make it possible to separate low energy less than or equal to 4 keV x-ray lines including the K lines of carbon, nitrogen and oxygen and the L and M lines for elements with atomic numbers in the range of 25-83. In light of these advances, this paper investigates the possibliity of using accelerating voltages less than or equal to 10 kV, as a method to improve the accuracy of elemental analysis for micrometer-sized particles.Citation
Journal of Research (NIST JRES) -
Volume
107 No. 6
NIST Pub Series
Pub Type
NIST Pubs
Keywords
electron probe analysis, low voltage analysis, particle analysis, scanning electron microscope, x-ray microanalysis
Citation
Created November 1, 2002, Updated February 17, 2017