NIST, Gaithersburg has recently installed a first generation silicon drift dectector (SDD) from Photon Imaging and the NIST Boulder microcalorimeter energy dispersive x-ray spectrometer ( cal-EDS) on a JEOL 840 SEM1 , as shown in Fig.1. [1,2] The instrument is also equipped with a conventional Si-Li x-ray detector (LINK ISIS 3 position turret) and a JEOL wavelength dispersive x-ray spectrometer. NIST, Gaithersburg staff have had the opportunity to work with these new detector tecnologies as users and to compare preliminary results with conventional systems.
Citation: Microscopy and Microanalysis
Issue: Suppl. 2
Pub Type: Journals
instrument, JEOL wavelength dispersive x-ray spectro, microcalorimeter, silcon drift detector systems