Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We have developed a simple transfer optics system that allows endstations to be attached to the exit flange of a large extreme-ultraviolet reflectometry facility. The system works as desired and predicted, and we will present preliminary results for two different experiments that use these optics.
Citation: Review of Scientific Instruments
Issue: No 4
Pub Type: Journals
detector packages, detectors, EUV lithography, extreme ultraviolet, radiometry, responsivity, synchrotron