The conversion of the electron storage ring at NIST (the National Institute of Standards and Technology) to SURF III (the Synchrotron Ultraviolet Radiation Facility) has resulted in a significant improvement to the azimuthal uniformity of magnetic field as well as the capability for operating at higher beam energies. Measurements of magnetic field strength revealed azimuthal uniformity of better than 0.5% at field strengths equivalent to operating energies of 52 MeV to 417 MeV. Initial operation is restricted to energies up to 331 MeV due to temporary limitations in the rf transmission system. Even at 331 MeV there is already a significant extension of the usable short wavelength range of the synchrotron radiation as compared to the range available at 284 MeV operating energy of SURF III. These and other improvements have a major impact on SURF programs including: the Nanodetector, a conversion microscope which is a prototype real-time imaging system for EUV (extreme ultraviolet) lithography; the Spectrometer Calibration Beamline which is used for high-accuracy absolute calibration of spectrometers; and the National EUV Reflectometry Facility, used to measure optical constants of thin-film multilayer optics.
Citation: Synchrotron Radiation Instrumentation
Issue: No. 1
Pub Type: Journals
electron storage ring, radiometry, reflectometry, spectrometer calibration, synchrotron radiation, ultraviolet microscopy