This work investigates the broadband propagation characteristics of transmission lines fabricated on silicon substrates of different conductivities. We compare calculations to measurements and examine the sensitivity of the frequency-dependent line parameters to substrate conductivity.
Proceedings Title: ARFTG Conference Digest-Spring, 54th (Volume: 36)
Conference Dates: December 2-3, 1999
Conference Location: Atlanta, GA
Conference Title: 54th ARFTG Conference Digest
Pub Type: Conferences
electromagnetic simulation, equivalent-circuit parameters, measurement, silicon substrate effect, transmission line