An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry
Published
Author(s)
David G. Seiler, John S. Suehle
Abstract
This special article in Semiconductor International discusses NIST's role in metrology for the semiconductor industry as it moves to the nanoscale regime.
Seiler, D.
and Suehle, J.
(2006),
Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry, Semiconductor International
(Accessed March 28, 2024)