Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry

Published

Author(s)

David G. Seiler, John S. Suehle

Abstract

This special article in Semiconductor International discusses NIST's role in metrology for the semiconductor industry as it moves to the nanoscale regime.
Citation
Semiconductor International

Citation

Seiler, D. and Suehle, J. (2006), Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry, Semiconductor International (Accessed March 28, 2024)
Created November 1, 2006, Updated January 27, 2020