In this paper, the design and proposed operation of a MEMS-based nanoassembly system is presented. The nanoassembly system is comprised of four nanomanipulators that can work independently or cooperatively. The design of the nanomanipulators will be discussed and experimental characterization results for one nanomanipulator will be presented. Three critical research issues for this project are then discussed: nanomanipulation strategies using the nanoassembly system; MEMS precision motion control; and integration of the on-chip nanoassembly system with a scanning electron microscope / focused ion beam instrument to obtain a complete nanomanufacturing environment.
Proceedings Title: Proceedings of the International Symposium on Nanomanufacturing | 2006| ISN
Conference Dates: November 3, 2006
Conference Location: Cambridge, MA
Conference Title: International Symposium on Nanomanufacturing
Pub Type: Conferences
MEMS, nanoassembly, nanomanipulation