HfO2-TiO2-Y2O3 is an interesting high-k dielectric system. Combinatorial library films of this system enable the study of the role of composition on phase formation as well as optical and mechanical properties. A library film of this system deposited at 400ºC exhibited a boundary line evident visually as well as in optical characterization. Mapping x-ray analysis showed the line corresponds to a crystallinity boundary, separating an amorphous phase and a FCC crystalline phase of yttrium hafnium oxide. Mapping nanoindentation across the boundary also revealed a sharp change in mechanical properties. The combinatorial technique is a powerful tool for high-throughput materials science, and by realizing this particularly unique PLD library film, allows many interesting materials phenomena and properties to be measured.
Citation: Thin Solid Films
Pub Type: Journals
Combinatorial, Thin films, Reflectometry, X-ray diffraction, Nanoindentation