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Preoxidation as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions

Published

Author(s)

William F. Egelhoff Jr., Robert McMichael, Cindi L. Dennis, Mark D. Stiles, Alexander J. Shapiro, Brian B. Maranville, Cedric J. Powell

Abstract

We have found that preoxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. When orange-peel coupling is suppressed, the hard-axis saturation field of the free layer is greatly reduced.
Citation
IEEE Transactions on Magnetics
Volume
42
Issue
10

Citation

Egelhoff Jr., W. , McMichael, R. , Dennis, C. , Stiles, M. , Shapiro, A. , Maranville, B. and Powell, C. (2006), Preoxidation as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions, IEEE Transactions on Magnetics (Accessed March 29, 2024)
Created September 30, 2006, Updated October 12, 2021