The evolving field of nanofabrication demands that more precise fabrication and evaluation tools be developed. We describe a method for creating a high quality focused ion beam with enhanced capabilities using an ion source based on laser-cooled neutral atoms in a magneto-optical trap. This technique will improve resolution and brightness beyond the current state of the art, can be used with the full range of atomic species that can be laser cooled and trapped, and will allow unprecedented control over the ion emission, allowing, for example, the production of single ions "on demand." We give estimates for the emittance and present a realistic ray tracing analysis of a basic focusing system demonstrating the feasibility of focusing the beam to a spot size of less than 10 nm.
Citation: Physical Review A (Atomic, Molecular and Optical Physics)
Pub Type: Journals
FIB, ion source, laser cooling and trapping