The third-order asymptotic aberration coefficients of round electrostatic lenses are reformulated in terms of the coordinates formed by the projections of the asymptotic incident and final rays onto the reference plane of the lens. In this formulation, all aberration coefficients are finite for all lenses, in contrast to the formulation in terms of coordinates projected onto the focal planes of the lenses, where all of the coefficients become infinite in the limit of very weak lenses and for certain strong lenses. Equations for the six third-order aberration coefficients are derived in the form of integrals involving derivatives of the axial potential no higher than the second. Using these equations and previously calculated potentials and first-order trajectories, we have computed the six aberration coefficients for the accelerating and decelerating two-tube electrostatic lens for voltage ratios from 1.1 to 10000. The results are believed accurate to better than 0.2%.
Citation: Review of Scientific Instruments
Pub Type: Journals