U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Quantitative Measurement of Arsenic Implant Dose by SIMS

Published

Author(s)

David S. Simons, P Chi, K J. Kim

Abstract

Some issues associated with making quantitative measurements of the arsenic implant dose in silicon by SIMS are described. These include the use of a certified reference material for calibration, the choice of silicon matrix reference species, the matrix normalization method, and minimization of detector count losses. A round-robin study is being conducted by ISO TC201/SC6 to determine the best analytical procedures and the level of interlaboratory agreement for this type of measurement.
Citation
Surface and Interface Analysis
Pub Type
Journals

Keywords

arsenic, depth-profiling, ion implant, round-robin study, silicon, SIMS

Citation

Simons, D. , Chi, P. and Kim, K. (2005), Quantitative Measurement of Arsenic Implant Dose by SIMS, Surface and Interface Analysis (Accessed April 24, 2024)

Created January 1, 2005, Updated February 17, 2017