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The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE

Published

Author(s)

P E. Thompson, C Silvestre, M E. Twigg, G Jernigan, David S. Simons
Proceedings Title
Materials Research Society Symposium
Conference Dates
February 11, 2009
Conference Location
none, PA
Conference Title
Proceedings of Materials Research Society Symposium

Citation

Thompson, P. , Silvestre, C. , Twigg, M. , Jernigan, G. and Simons, D. (1998), The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE, Materials Research Society Symposium, none, PA (Accessed March 29, 2024)
Created November 30, 1998, Updated October 12, 2021