Atomic force microscope (AFM) is a rapidly evolving technique which has been used in numerous academic studies since its invention eight years ago. AFM manufacturers are now marketing instruments for industrial metrology applications. The National Institute of Standards and Technology (NIST) is developing a specially designed calibrated AFM (CAFM) system that will be capable of calibrating artifacts which, in turn, can be used to calibrate commercial AFMs. The need for calibration for the AFM community is first developed. The CAFM system design goals are then summarized. The critical electro-mechanical and metrology issues involved in the design, construction and operation of the CAFM are then discussed. Finally, the current status of the instrument is summarized, and preliminary measurements are presented.
Proceedings Title: Proceedings of ASPE
Conference Dates: October 2-7, 1994
Conference Location: Cincinnati, OH
Pub Type: Conferences