Recent years have seen the emergence of a new generation of SPM techniques, which intend to measure chemical, mechanical, and electro/optical properties on the nanoscale. Currently, these techniques provide qualitative (or semi-quantitative) data, often expressed in terms of relative instrument parameters (e.g. piezo voltage or cantilever response. In this article, we will describe our research at NIST, which aims to produce reference specimens that help calibrate these more complex SPM techniques.
Citation: Microscopy and Microanalysis
Issue: No. 4
Pub Type: Journals
AFM, combinatorial, gradient patterns, high-throughput, reference specimens, scanned probe microscopy, SPM