Barium strontium titanate (BST) thin films of varying composition and thickness (5nm to 400nm) on (100)Si or Pt/(100)Si substrates were measured using an electron microprobe analyzer with wavelength dispersive x-ray spectrometers. Most of the films were fabricated at NIST by a metalorganic deposition approach. Several films from external sources that were fabricated by sputtering or metalorganic chemical vapor deposition were also measured. For some of the films, the compositions determined by electron microprobe were in reasonably good agreement with the nominal compositions provided by the film suppliers. However, for other films, including the thinnest ones, there were large discrepancies between the measured and nominal compositions. Thicknesses obtained from the microprobe analysis are compared with values measured by other techniques.
Proceedings Title: Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP
Conference Dates: June 26-29, 2000
Conference Location: Gaithersburg, MD
Conference Title: AIP Conference Proceedings
Pub Type: Conferences
Barium Strontium Titanate, BST thin films, Electron Probe Microanalysis, film thickness