Techniques based on scanning probe microscopy (SPM) are used to fabricate surface structures with dimensions ranging from 10 - 100mm. These structures have been fabricated and imaged using a scanning tunneling microscope (STM), and the STM requires the tip-sample distance to be controlled with picometer precision. This requirement must be satisfied in the presence of external vibrations with micrometer amplitude, temperature drifts and acoustic perturbations. In this manuscript, the results of dynamic modeling and vibration analysis of a STM that is currently being built and tested at the National Institute of Standards and Technology (NIST) are presented. The design of an eddy current damping system to isolate the STM unit from environment vibrations is also discussed.
Proceedings Title: ASME Annual Conference 2005
Conference Dates: October 9-14, 2005
Conference Location: Norfolk, VA
Conference Title: Proceedings of the American Society for Precision Engineering 2005 Annual conference
Pub Type: Conferences
eddy current damping, modal analysis, STM