Initial heterogeneity testing with the electron microprobe using WDS of three SiGe wafers cut from single-crystal boules of different concentrations (nominally 3.5, 6.5, and 14 atomic % Ge) is described. Random and repeat samplings over the entire surfaces were used to determine the between sector (or sample), the between point, and the experimental variances. These variances were later used to calculate the overall uncertainty contribution from heterogeneity only for each specimen. In addition 2-υm and 5-υm step traverses were used to determine if heterogeneity was present over short distances. The two wafers that were higher in Ge concentration were found to be more homogeneous than the 3.5 atomic % Ge wafer.
Issue: Supp. 1
Conference Dates: August 5-8, 2002
Conference Location: Quebec, -1
Conference Title: Microscopy and Microanalysis 2002
Pub Type: Conferences
electron microprobe, heterogeneity testing, homogeneity, SiGe, SiGe single crystals, uncertainty, variances, wavelength dispersive spectroscopy (WDS), x-ray traverses