Goyettes, A.
, Wang, Y.
and Olthoff, J.
(2001),
Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6, Journal of Vacuum Science and Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24749
(Accessed April 19, 2024)
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Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6
Published
Author(s)
Amanda N. Goyettes, ,
Citation
Journal of Vacuum Science and Technology A
Volume
19
Issue
4
Pub Type
Journals
Download Paper
Citation
Created June 30, 2001, Updated October 12, 2021