We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from 0.2 keV to 2 keV, offers significant advantages for low-beam voltage (high-spatial-resolution) x-ray microanalysis for critical applications in the semiconductor industry such as particle analysis. We present several examples in which the low-energy υcal EDS has successfully solved problems important to the semiconductor industry, including analyses of small contaminant particles (Al, Al oxide, Cu) and thin films (TiN, TiO2, o.5 wt.% Cu in Al). We also describe the future development of a large-format microcalorimeter array with significantly improved total effective area and total count rate.
Proceedings Title: Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech.
Conference Dates: June 26-29, 2000
Conference Location: Gaithersburg, MD
Pub Type: Conferences
microcalorimeter array, microcalorimeter energy-dispersive spectrometer, particle analysis, x-ray microanalysis