Microfluidic systems for analytical, medical, and sensing applications integrate optical or electrical readouts in low-cost, low-volume consumption systems. Embedding chemically functionalized templates with nanoscale topography within these devices links the scale at which molecular recognition and self-organization occurs and the macroscopic layout of fluid channels, mixing volumes, and detection regions. This paper addresses a path toward standardization of manufacturing procedures for microfluidic devices through: 1) scanning probe lithography to produce sub-50-nm scale features in a silicon master; 2) master replication in plastics by hot embossing; and 3) the development of a generic microfluidic experimental platform that orients 125 micrometer channels embossed in a poly (vinyl chloride) gasket to an array of high-speed machined channels and a silicon substrate.
Citation: J. Manufacturing Processes
Pub Type: Journals
machining, micro-forming, nano-lithography