Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484c and 484f.
Citation: Journal of Research of the National Institute of Standards and Technology
Pub Type: Journals
interferometer, precision, random error, SRM, systematic error, uncertainty