Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly onto a wafer, wafer piece or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope. The chip can also be mounted onto a drop-in type wafer holder. This Reference Material is fully compatible with state-of-the-art integrated circuit technology.
Proceedings Title: Proceedings of SPIE
Conference Dates: February 26, 2001
Conference Location: Santa Clara, CA
Conference Title: Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
Pub Type: Conferences
CD, CD-SEM, measurement, metrology, performance, reference material, scanning electron microscope, SEM, standard