The dielectric constant of the embedded capacitance materials was measured in the frequency range from 100 Hz to 5 GHz. The testing included evaluation of the capacitance density, leakage current, and the effect of HAST on the capacitance. A test specimen and test procedure have been designed for dielectric characterization of the embedded capacitance materials and used as common test vehicles to compare dielectric constant of High K films that have recently been developed by the industry. The objectives of NIST involvement in this NCMS-led project was to develop and evaluate a test method suitable for dielectric permittivity of high K polymer composite films that covers broader functional frequency range including the microwave.
Citation: Embedded Decoupling Capacitance Project
Pub Type: Others
capacitor, dielectric constant, electronic, embedded, frequency, measurement, polymer, test pattern, thin film