A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An accuracy of better than 10% can be achieved for spring constants from 0.1 N/m to 102 N/m. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly at the tip location of an atomic force microscopy cantilever. The paper also demonstrates a technique to detect and correct apparent length anomalies of cantilevers by analyzing spring constants at multiple positions.
Citation: Review of Scientific Instruments
Pub Type: Journals
atomic force microscopy, calibration, cantilever, indenter, spring constant, stiffness