A new method of calibrating the stiffness of atomic force microscope (AFM) cantilevers is demonstrated using a unique array of uniform microfabricated reference cantilevers. A series of force-distance curves were obtained using a commercial AFM test cantilever on the reference cantilever array and the data analyzed using an implied Euler-Bernoulli model to extract the spring constant from a linear regression fit of the data. This method offers a factor of three improvement in the precision of the reference cantilever calibration method and when combined with the SI traceability potential of the cantilever array can provide very accurate spring constant calibrations.
Citation: Review of Scientific Instruments
Pub Type: Journals
AFM, array, calibration, cantilever, spring constant