Calorimetric probes for near-field imaging of high-frequency (1-20 GHz) magnetic fields were fabricated by depositing patterned metal structures on micromachined, dielectric multilayer cantilevers. In the presence of high-frequency magnetic fields, the metal structures are heated via the generation of eddy currents or via ferromagnetic resonance (FMR). Measurement of the resulting cantilever deflection as a function of probe position produces a map of the microwave power distribution. Comparative measuements from probes with 5 and 10 υ Au rings show that the rings are the active area for eddy current generation. Probes with 10 υ square permalloy patches function in both the eddy current and FMR imaging modes.
Citation: Journal of Applied Physics
Pub Type: Journals
ferromagnetic resonance (FMR), microwaves, near field, scanning microwave microscopy