In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are commonly used in microhotplates, and relies on the long term temperature stability of different types of temperature sensors, which may not be suitable for direct calibration.
Citation: IEEE Electron Device Letters
Pub Type: Journals
Microhotplate, Calibration, Temperature sensor, BIST, Platinum-Rhodium, Thermocouple