The transmission of soft x-rays with photon energies from 1606 eV to 2106 eV was measured for tungsten using thin film samples and a synchrotron source. This region includes the MIV and MV edges. The two tungsten films had thicknesses of 107.7 10 nm and 51.5 10 nm; the intensity of the transmitted x rays was measured with a silicon photodiode. The values for the mass absorption coefficient reported here were determined from the ratios of the transmission through the two samples, i.e., through a net 56.2 14 nm of tungsten, and some additional constant factors. The MV,IV edges have widths (10%-90% after backgroundsubtraction) of 33 5 eV and 28 5 eV, respectively, compared to zero width in all x-ray tables based on atomic form factors and 44 eV within a real-space multiple-scattering theory. The measurements are relevant to microspectroscopy and microtomography of integrated circuit interconnects and may be applicable to accurate measurement of the mass absorption coefficinets of similar dense elements.
Citation: Advanced Photon Source activity report
Pub Type: Others
M-sub-IV edge, M-sub-V edge, mass absorption coefficient, tungsten