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PUBLICATIONS

Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers

Published

Author(s)

Robert G. Downing, David S. Simons, George P. Lamaze, Richard M. Lindstrom, Robert R. Greenberg, Rick L. Paul, Susannah B. Schiller, William F. Guthrie
Citation
Journal of Vacuum Science and Technology
Pub Type
Journals

Citation

Downing, R. , Simons, D. , Lamaze, G. , Lindstrom, R. , Greenberg, R. , Paul, R. , Schiller, S. and Guthrie, W. (2007), Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers, Journal of Vacuum Science and Technology (Accessed April 19, 2024)

Created November 1, 2007, Updated February 17, 2017